Characterization equipment
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Hitachi S-9920 CD-SEM
High Resolution automated CD measurements. Automated CD measurements for inline process control and process development
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SEM JEOL
High Resolution SEM JEOL 7500 FA. Low voltage SEM. Possible acceleration voltages 0.1-30 kV.
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SEM ZEISS
High resolution SEM imaging
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SEM / FIB workstation, FEI
Characterization and manipulation of nanostructures SEM imaging, x-section inspection, fabrication of nanostructures
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X-ray Photo Electron Spectrometer, K-Alpha
X-ray Photoelectron Spectrometer equiped with depth profiling by means of argon ion sputtering and stage tilting.
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X-ray diffractometer (XRD), PanAlytical
High Resolution X-Ray Diffraction for the analysis of phase composition, thickness, roughness and defects in the thin layers....
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Capacitance Voltage (CV) profiler
Capacitance-Voltage (CV) profiler, Carrier Density Measurement
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Tencor Surface profiler
Tencor Surface profiler. Non-destructive step height measurement
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Bruker DekTak XT
Bruker DekTak XT
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Filmetrics
Filmetrics
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Spectroscopic ellipsometer, Sentech
Spectroscopic ellipsometer Sentch 805 SE, measurement of thickness and refractive index.
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Optical microscopes
Optical microscopy. Polyvar Reichert Jung/Metalloplan Leitz/Jenatech
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