Department of Applied Physics

Plasma & Materials Processing

Our scientific objective is to obtain atomic-level understanding of the interaction of plasmas and reactive gases with materials in the field of atomic scale processing.

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We are unique in our approach to studying plasma and surface processes in situ and in real time with a large set of current and new diagnostics

We focus on advancing the science and technology of plasma and materials processing, a multidisciplinary research area that encompasses the research fields of plasma physics, surface science and materials science. Our aim is to be an internationally leading group in the field of atomic scale processing, for present-day and future applications in energy technologies, nanoelectronics and nanotechnology.

The group studies the physics of the plasma medium, how reactive species interact with surfaces and how atomic scale processes can be used to fabricate, prepare or modify materials and their surfaces. We do so through our advanced processing facilities, our large set of plasma and surface diagnostics and state-of-the-art material analysis techniques.

News

January 17, 2023
BatteryNL consortium kicks off
In search of the coveted safer, better, longer-lasting battery
Read more
October 26, 2022
Nanolayers for germanium surface passivation prepared by Atomic Layer Deposition and Chemical Vapor Deposition
Willem-Jan Berghuis defended his PhD thesis at the department of Applied Physics and Science Education on October 25th.
Read more
More news
Small change could enable big improvement in batteries
January 26, 2022
Passion for plasma and people
December 3, 2021
Enabling future nanoelectronics with plasma-assisted atomic layer deposition
September 20, 2021
The electrolyzer enigma: how solving it could enable the energy transition
September 16, 2021

Our PRINCIPAL INVESTIGATORS

Erwin Kessels

Atomic scale processing

We aim to develop advanced atomic layer deposition and etching processes through in-depth understanding of the underlying reaction…

Adriana Creatore

Interfaces in future energy technologies

Presently, novel ALD merits are unraveled when atomic layer processing meets energy conversion and storage technologies such as…

Plasma-based gas conversion

In the PMP research group we strive to obtain fundamental understanding of the kinetics and dynamics of plasma conversion of gases, both…

Processing of low-dimensional nanomaterials

Driven by Moore’s scaling law and the transition to a sustainable society there is an enormous push to develop nanomaterials for novel…

Adrie Mackus

Selective atomic-scale processing for nanoelectronics

Our research encompasses thin film deposition and etching for applications in nanoelectronics, with a focus on selective processing for…

Work with us!

Please check out the TU/e Vacancies page for further opportunities within our group.

 

Research themes

Advanced ALD technologies

ALD for energy

CO2 neutral fuels

Fundamentals of ultrathin film growth

Future nanoelectronics and nanopatterning

Nanolayers for solar cells

Processing of nanomaterials

TCOs and thin film encapsulation

Eindhoven Hendrik Casimir Institute

The Eindhoven Hendrik Casimir Institute (EHCI) brings together the world-class photonics and quantum research at TU/e to create a unique and optimal environment to enable these fields to grow synergetically. The institute´s interdisciplinary approach paves the way for collaborations to create new paradigms in computing, communication and sensing. 

The mission of the Eindhoven Hendrik Casimir Institute is to contribute to a sustainable information society, by bringing together TU/e’s unique core strengths in photonics and quantum technology, from materials to systems. Interdisciplinary projects will bring scientists in these fields together. 

Meet some of our Researchers

Full Professor

Erwin Kessels

Full Professor

Adriana Creatore

Assistant Professor

Harm Knoops

Associate Professor

Adrie Mackus

Assistant Professor

Bart Macco

University Researcher

Marcel Verheijen

University Researcher

Willem-Jan Berghuis

Maik Budde

University Researcher

Richard Engeln

University Lecturer

Erik Langereis

Full Professor emeritus

Daan Schram

Full Professor

Richard van de Sanden

Facilities

The NanoLabTUe offers a unique combination of equipment for developing optical chips and other applications based on compound semiconductor technology.

With the facilities of the SolarLab, atomic layers can be applied to solar cells, in a quick, controlled manner, making solar cells even more efficient.

Recent Publications

Our most recent peer reviewed publications

Education

Check out all our courses and our available student projects

Are you a student interested in doing a BEP project or graduating in the Plasma & Materials Processing group? There are ample traineeship opportunities for students within our group.

If you are interested in a BEP or MSc graduation project in the PMP group, you can contact Adrie Mackus, Adriana Creatore or Erwin Kessels. It is also possible to have a lab tour if you want to orient yourself on the various possibilities.

In all projects you team up with one or more of our PhD students and staff members. You are a full member of such research team and  will get a flavour of state-of-the-art atomic scale processing research.

PHOTONDELTA FAST CAREER TRACK PROGRAM

Integrated photonics will have major impact in areas such as communications, healthcare, agro-food, and mobility. The market is growing fast and thousands of jobs will be created. TU/e is the place to start a career in this field.

Do you want to be part of this future?

Then you should consider the new PhotonDelta Fast Career Track program. This program involves TU/e Master students in Applied Physics or Electrical Engineering in photonics research and applications, together with researchers and companies active in this field. For more information please consult:

PhotonDelta Fast Career Track Program for Applied Physics students

Interested? Send an email to photonicscareer@tue.nl

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